Main properties and parameters of Nano-Electro-Mechanical-System (NEMS) resonators are introduced.

介绍了NEMS谐振器的主要特点与性能参数。

The alternatives, then, are to make the circuit entirely out of NEMS transistors.

那么另一个方案就是完全用NEMS晶体管制造电路。

As we shrink MEMS to NEMS, device physics becomes increasingly dominated by the surfaces.

当我们把尺寸从mems缩小到NEMS时, 表面在元件物理的地位就变得越加重要.

The major obstacle to develop MEMS and NEMS technique on quartz is the machining difficulty and the charging problem resulted from isolation in e-beam exposure process.

在石英材料上发展微奈米机电系统技术，最主要的瓶颈在于其加工困难度及非导电性在进行电子束微影时所产生之电荷累积效应。