The progress of MEMS was introduced and prospected.

介绍了微机电系统当前的进展与发展前景。

The optimization of the MEMS fabrication process is analyzed.

分析了MEMS制作工艺的改进。

LIGA technology play a very important role in the fabrication of MEMS.

LIGA技术在微机械结构的制作中具有很重要的作用。

The characteristic size of MEMS components is from micron to millimeter.

MEMS器件的特征尺寸范围为几微米到几毫米。

The kernel problem in virtual MEMS fabrication process is process model.

MEMS加工工艺的核心是工艺模型。

This method may be further extended to the analysis of other MEMS devices.

这种方法也可以推广应用到其它MEMS器件的优化问题。

This paper reviews the techniques and applications of diamond MEMS devices.

本文主要综述了金刚石MEMS器件的技术和应用。

The output of MEMS accelerometer is influenced by the environment temperature.

微机械加速度计的输出受到环境温度的影响。

The basic concept of optical switch, MEMS and MEMS optical switch were introduced.

介绍了光开关、MEMS和MEMS光开关的基本概念。

Expansibility is a very important performance for the design of MEMS optical switch array.

在MEMS光开关阵列设计中，扩展性是一项非常重要的指标。

It gives full preparation to extract and analysis dynamic characteristics of MEMS devices.

从而为后续MEMS器件动态特征的提取和分析做充分的准备。

A new system for the in situ extraction of the material parameters of MEMS films is presented.

给出了一种MEMS薄膜材料参数的在线测试技术与方法。

Tunneling magnetometer is a kind of MEMS magnetometer based on tunnel effect in quantum mechanics.

隧穿磁强计是一种利用量子力学中隧道效应原理研制的MEMS磁强计。

Micro actuator is the kernel part of MEMS, with wide application range and important research value.

微执行器是微机电系统的核心部件，应用范围广泛，具有重要的研究价值。

Therefore, it's very important of micro adhesion testing technology in studying adhesion problem of MEMS.

因此，对于MEMS粘着问题的研究，微观粘着测试技术显得极为重要。

Two of the newest mobile phones, Google's Nexus one and Motorola's Droid, both use MEMS microphones in this way.

两部最新款手机，谷歌Nexus One和摩托罗拉droid均使用MEMS麦克风来降噪。

A uniaxial tensile test method for measuring mechanical properties of MEMS thin film materials is presented.

介绍了一种用于MEMS薄膜材料力学特性测试的单轴拉伸试验方法。

The research indicates that nonlinearity has a very important effect on the dynamical behavior of MEMS system.

初步研究表明：非线性对微机械电子系统动力学行为有着严重的重要的影响。

According to the requirement of the MEMS test, a MEMS testing system using computer microvision was developed.

根据MEMS测试的要求，设计并实现了一种基于计算机视觉的MEMS测试系统。

This trend has already been seen in the MEMS field over the past few years, and will repeat itself in the future.

过去几年，这种趋势已经出现在MEMS领域，未来也将重演。

At last, the trends of MEMS and MEMSpackaging are prospected, and the integrated MEMS system packaging is discussed.

最后对MEMS和MEMS封装的走向进行了展望，并对全集成MEMS系统的封装进行了一些探讨。

The results can provide the means of analysis and design for the mechanism design and performance analysis of MEMS .

这些研究成果为微机械的结构设计、性能分析和制造工艺提供磨擦学的基本分析设计方法。

In this paper, the introduction of the MEMS technology and some useful MEMS devices were widely discussed in the first chapter.

论文首先讨论了MEMS技术及几种常用的MEMS典型器件和本论文要用到的微机械加工技术。

Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS.

微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。

Stability: 6 DOF motion measurement and control, the use of high-performance MEMS sensor technology, impact resistance, low drift.

稳定：6自由度运动测控，采用高性能MEMS工艺传感器，抗冲击、低漂移。

A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.

提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。

Akustica, based in Pittsburgh, Pennsylvania, puts a MEMS microphone complete with the circuitry needed for digital output into a package less than 5mm square.

宾夕法尼亚州匹兹堡的Akustica公司将MEMS麦克风与用于数字输出的电路配套放入一个不足5平方毫米的组件中。

However Mirasol, as Qualcomm's method is known, merely USES MEMs to turn a pixel on or off (by reflecting either one wavelength of light, or none at all).

然而Mirasol, Qualcomm的一种方法，仅仅使用MEMs控制一个像素的打开与关闭(通过反射一种波长或不反射)。

Presently, conventional energy and existing micropower, in volume, life-time, stability and the adaptation for environment, can't far reach the needs of MEMS.

目前常规能源和现有的微能源在体积、使用寿命、稳定性及对环境的适应能力方面远达不到微系统的需要。