The experiments show that the diffraction error can be eliminated with lens array photolithography method and high-quality grating can be developed.

实验表明透镜阵列光刻法，可以较好的消除衍射误差，研制出高质量的光栅。

Engineers use photolithography to fabricate microchips with high precision.

工程师使用光刻技术高精度地制造微芯片。

Researchers are developing new materials to enhance photolithography processes.

研究人员正在开发新材料以增强光刻技术工艺。

Photolithography is a crucial step in the production of integrated circuits.

光刻技术是集成电路生产中的关键步骤。

Advances in photolithography have significantly improved the resolution of electronic components.

光刻技术的进步显著提高了电子元件的分辨率。

The semiconductor industry relies heavily on photolithography for creating intricate circuit patterns.

半导体行业严重依赖光刻技术来创建复杂的电路图案。

Simulation and experiments show that for point array or hole array patterns with the same sizes maskless interference photolithography is much simple than the traditional photolithography.

模拟和实验结果表明，对点阵或孔阵图形，在同样的图形尺度下，无掩模干涉光刻比传统光刻简单得多。

Atom photolithography is a new application of atom optics in microfabrication technical field.

原子光刻是原子光学在微细加工技术领域的新应用.

Alignment Precision - Displacement of patterns that occurs during the photolithography process.

套准精度 - 在光刻工艺中转移图形的精度.

Photolithography combined with etching technique is the most commonly used technique for fabrication of silicon, glass and quartz microfluidic chips.

光刻和蚀刻技术常用于加工硅、玻璃和石英芯片。