Diamond-like carbon(DLC) films were prepared on the single crystal silicon substrate by way of DC-RFPECVD.

采用射频-直流等离子体增强化学气相沉积技术在单晶硅衬底上沉积了类金刚石薄膜。

Diamond-like carbon (DLC) films were prepared on the single crystal silicon substrate by way of DC-RFPECVD.

采用射频-直流等离子体增强化学气相沉积技术在单晶硅衬底上沉积了类金刚石薄膜。