用干涉显微镜测量各组样本的表面粗糙度。

Their roughness values were measured by interference microscope.

同时给出了该方法原理性实验的观察结果，并与微分干涉显微镜的观察结果进行了对比。

In addition, the observed result of the theoretical experiment, and a comparison to the result from a differential interference microscope is also provided.